Dual electrode capacitive micromachined ultrasonic transducer array for 1-D intracardiac echocardiography (ICE)
Citation
Güldiken, R. O., Zahorian, J. S., Karaman, M. & Değertekin, F. L. (2007). Dual electrode capacitive micromachined ultrasonic transducer array for 1-D intracardiac echocardiography (ICE). Paper presented at the 2, 349-350. doi:10.1115/IMECE2007-42480Abstract
We designed and fabricated a 64 element 1-D linear dual electrode Capacitive Micromachined Ultrasonic Transducer (CMUT) array operating at 9.5 MHz for Intracardiac Echocardiography (ICE). The dual electrode CMUT structure increases the overall sensitivity by 12.6dB (6.2dB in receive sensitivity; 6.4dB in output pressure) when compared to optimized single electrode CMUT. We report peak output pressure of 2.3MPa on the CMUT surface when 170V AC and 180V DC is applied. This significant performance increase makes the CMUT more competitive with their piezoelectric counterparts.
