Forward-looking IVUS imaging using an annular-ring CMUT array

Abstract

A 64-element, 1.15mm diameter annular-ring CMUT array was characterized and used for forward-looking IVUS imaging tests. The array was manufactured using low temperature processes suitable for CMOS electronics integration on a single chip. The 43×140µm2 array element has suitable view angle for forward looking imaging around 15MHz center frequency and pulse-echo measurements show nearly 100% fractional bandwidth around 17MHz. For imaging and SNR measurements, RF A-scan data sets from various targets were collected using an interconnect scheme forming a 32-element array configuration. The results demonstrate that annular-ring CMUT arrays fabricated with CMOS compatible processes are capable of forward-looking IVUS imaging.