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  • Elektrik-Elektronik Mühendisliği Bölümü / Department of Electrical-Electronics Engineering
  • MF - Bildiri Koleksiyonu | Elektrik-Elektronik Mühendisliği Bölümü / Department of Electrical-Electronics Engineering
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Volumetric imaging using 2D capacitive micromachined ultrasonic transducer arrays (CMUTs): Initial results

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Date

2002

Author

Oralkan, Ömer
Ergün, Arif Sanlı
Cheng, Chinghsiang
Johnson, Jeremy A.
Karaman, Mustafa
Lee, Thomas H.
Khuri-Yakub, Butrus Thomas

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Citation

Oralkan, O., Ergun, A. S., Cheng, C., Johnson, J. A., Karaman, M., Lee, T. H., & Khuri-Yakub, B. T. (2002). Volumetric imaging using 2D capacitive micromachined ultrasonic transducer arrays (CMUTs): Initial results. Paper presented at the , 2 1083-1086 vol.2. doi:10.1109/ULTSYM.2002.1192483

Abstract

This paper presents the first volumetric images obtained using a 2D CMUT array with through-wafer via interconnects. An 8×16-element portion of a 32×64-element array flip-chip bonded onto a glass fanout chip was used in the experiments. This study experimentally demonstrates that 2D CMUT arrays can be fabricated with high yield using silicon micromachining processes, individual electrical connections can be provided using through-wafer interconnects, and the flip-chip bonding technique can be used to integrate the dense 2D arrays with electronic circuits for practical imaging applications.

Source

Proceedings of the IEEE Ultrasonics Symposium

Volume

2

URI

https://hdl.handle.net/11729/2059
https://dx.doi.org/10.1109/ULTSYM.2002.1192483

Collections

  • MF - Bildiri Koleksiyonu | Elektrik-Elektronik Mühendisliği Bölümü / Department of Electrical-Electronics Engineering [211]
  • Scopus İndeksli Bildiri Koleksiyonu [409]

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  • Integrated ultrasonic imaging systems based on CMUT arrays: Recent progress 

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    This paper describes the development of an ultrasonic imaging system based on a two-dimensional capacitive micromachined ultrasonic transducer (CMUT) array. The transducer array and front-end electronics are designed to ...
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  • Dual-annular-ring CMUT array for forward-looking IVUS imaging 

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